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Computer simulation study for the design of a capacitively coupled plasma reactor for efficient formation of silicon nano particles
- Authors
- 김호준
- Issue Date
- 20-Aug-2024
- Place
- 제주 신화 월드
- Conference Name
- 2024 International Forum on Functional Materials
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Related Researcher
- Kim, Ho Jun
- ERICA 공학대학 (DEPARTMENT OF MECHANICAL ENGINEERING)