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Effects of RF power and oxygen gas on the characteristics of thin film transistors with co-sputtered silicon zinc oxide channel layers
- Authors
- 박진석
- Issue Date
- 2-May-2013
- Place
- San Diego, USA
- Conference Name
- International Conference on Metallurgical Coatings and Thin Films
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Related Researcher
- PARK, JIN SEOK
- ERICA 공학대학 (SCHOOL OF ELECTRICAL ENGINEERING)