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Non Destructive Nanoparticle Removal from Submicron Structures Using Megasonic cleaning
- Authors
- 박진구
- Issue Date
- 18-Sep-2012
- Place
- Ghent, Belgium
- Conference Name
- 11th International symposium on Ultra Clean Processing of Semiconductor Surfaces
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Related Researcher
- Park, Jin Goo
- ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)