Effect of FOUP atmosphere control on process wafer integrity in sub20 nm device fabrication
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kim, Bong ho | - |
dc.contributor.author | Park, Jin-Goo | - |
dc.date.accessioned | 2021-06-22T21:42:00Z | - |
dc.date.available | 2021-06-22T21:42:00Z | - |
dc.date.created | 2021-01-22 | - |
dc.date.issued | 2015 | - |
dc.identifier.issn | 1012-0394 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/20561 | - |
dc.description.abstract | Defects could be generated on the wafers by the particle contamination, formation of organic residue, corrosion, native oxide growth on the surface and airborne molecular contaminants (AMC) [1] etc. These problems hinder the device performance and also can decrease the yield and productivity in the semiconductor manufacturing process. It could be resolved by various cleaning methods [2]. However, the results such as corrosion, native oxide growth on wafer and AMC deposition should be handled properly by N2 gas purge prevention method during the process or standby [3,4]. It should be implemented before starting the process, which can maximize the productivity with a higher yield by minimizing the process queue and maintaining wafer surface integrity in sub 20 nm device fabrication. | - |
dc.language | 영어 | - |
dc.language.iso | en | - |
dc.publisher | Scitec Publications Ltd. | - |
dc.title | Effect of FOUP atmosphere control on process wafer integrity in sub20 nm device fabrication | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Park, Jin-Goo | - |
dc.identifier.doi | 10.4028/www.scientific.net/SSP.219.256 | - |
dc.identifier.scopusid | 2-s2.0-84914102350 | - |
dc.identifier.bibliographicCitation | Solid State Phenomena, v.219, pp.256 - 259 | - |
dc.relation.isPartOf | Solid State Phenomena | - |
dc.citation.title | Solid State Phenomena | - |
dc.citation.volume | 219 | - |
dc.citation.startPage | 256 | - |
dc.citation.endPage | 259 | - |
dc.type.rims | ART | - |
dc.type.docType | Conference Paper | - |
dc.description.journalClass | 1 | - |
dc.description.isOpenAccess | N | - |
dc.description.journalRegisteredClass | scopus | - |
dc.subject.keywordAuthor | Corrosion | - |
dc.subject.keywordAuthor | FOUP | - |
dc.subject.keywordAuthor | N2 Purge | - |
dc.subject.keywordAuthor | Process queue | - |
dc.identifier.url | https://www.proquest.com/docview/1791380468?accountid=11283 | - |
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