Fabrication of Less Bowed Light-Emitting Diodes on Sapphire Substrates with a SiO2 Thin Film on Their Back Sides
- Authors
- Lee, Seungmin; Kim, Jonghak; Oh, Chan-Hyoung; Shim, Jong-In; Park, Yongjo; Yoon, Euijoon
- Issue Date
- Sep-2019
- Publisher
- 한국물리학회
- Keywords
- Light-emitting diodes; Stress relaxation; Internal quantum efficiency
- Citation
- Journal of the Korean Physical Society, v.75, no.6, pp.480 - 484
- Indexed
- SCIE
SCOPUS
KCI
- Journal Title
- Journal of the Korean Physical Society
- Volume
- 75
- Number
- 6
- Start Page
- 480
- End Page
- 484
- URI
- https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/2330
- DOI
- 10.3938/jkps.75.480
- ISSN
- 0374-4884
- Abstract
- In this study, less bowed light-emitting diodes (LEDs) were fabricated by preparing a LED structure on a sapphire substrate with a SiO2 thin film on its back side. The SiO2 thin film with a low thermal expansion coefficient reduced the bow of the wafer generated by the thermal expansion coefficient difference. As the thickness of SiO2 was increased from 1 mu m to 4 mu m, the compressive stress in the GaN film was reduced from 16% to 62% with respect to that without SiO2 thin film. The stress reduction in multiple quantum wells also enhanced the internal quantum efficiency of the LED by reducing the piezoelectric field.
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Collections - COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY > DEPARTMENT OF PHOTONICS AND NANOELECTRONICS > 1. Journal Articles
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