Fabrication of highly sensitive capacitive pressure sensors with porous PDMS dielectric layer via microwave treatment
DC Field | Value | Language |
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dc.contributor.author | Kim, Yeongjun | - |
dc.contributor.author | Jang, Shin | - |
dc.contributor.author | Oh, Je Hoon | - |
dc.date.accessioned | 2021-06-22T09:43:22Z | - |
dc.date.available | 2021-06-22T09:43:22Z | - |
dc.date.created | 2021-01-21 | - |
dc.date.issued | 2019-07 | - |
dc.identifier.issn | 0167-9317 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/2437 | - |
dc.description.abstract | This work aims to present a flexible, highly sensitive, capacitive pressure sensor based on an elastomeric dielectric layer with uniformly distributed micro-pores. The porous dielectric layer was simply produced by microwave treatment of polydimethylsiloxane (PDMS) mixed with a sacrificial solvent within a few minutes. The pressure sensor using a porous PDMS dielectric layer fabricated with 40 wt% sacrificial solvent had a sensitivity of 0.813 kPa(-1), which is 11 times higher than that of the sensor using a non-porous dielectric layer. To further improve the sensitivity, low-cost commercial glass was used as a mold to form microstructures on the surface of the porous dielectric layer. Due to the enhanced deformability, high sensitivity of 1.43 kPa(-1) and a fast response time of 70 ms was achieved. The performances of a sensor array as well as finger sensors were also demonstrated by placing light-weight objects on the array and holding a plastic cup. It would be expected that the proposed sensors could be utilized in the application of artificial skins or soft robotics. | - |
dc.language | 영어 | - |
dc.language.iso | en | - |
dc.publisher | ELSEVIER | - |
dc.title | Fabrication of highly sensitive capacitive pressure sensors with porous PDMS dielectric layer via microwave treatment | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Oh, Je Hoon | - |
dc.identifier.doi | 10.1016/j.mee.2019.111002 | - |
dc.identifier.scopusid | 2-s2.0-85066414768 | - |
dc.identifier.wosid | 000480665600031 | - |
dc.identifier.bibliographicCitation | MICROELECTRONIC ENGINEERING, v.215, pp.1 - 7 | - |
dc.relation.isPartOf | MICROELECTRONIC ENGINEERING | - |
dc.citation.title | MICROELECTRONIC ENGINEERING | - |
dc.citation.volume | 215 | - |
dc.citation.startPage | 1 | - |
dc.citation.endPage | 7 | - |
dc.type.rims | ART | - |
dc.type.docType | Article | - |
dc.description.journalClass | 1 | - |
dc.description.isOpenAccess | N | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Engineering | - |
dc.relation.journalResearchArea | Science & Technology - Other Topics | - |
dc.relation.journalResearchArea | Optics | - |
dc.relation.journalResearchArea | Physics | - |
dc.relation.journalWebOfScienceCategory | Engineering, Electrical & Electronic | - |
dc.relation.journalWebOfScienceCategory | Nanoscience & Nanotechnology | - |
dc.relation.journalWebOfScienceCategory | Optics | - |
dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
dc.subject.keywordPlus | ELASTOMER | - |
dc.subject.keywordAuthor | Pressure sensor | - |
dc.subject.keywordAuthor | Porous structures | - |
dc.subject.keywordAuthor | Microwave treatment | - |
dc.subject.keywordAuthor | Polydimethylsiloxane (PDMS) | - |
dc.subject.keywordAuthor | Surface microstructure | - |
dc.subject.keywordAuthor | Capacitance | - |
dc.identifier.url | https://www.sciencedirect.com/science/article/pii/S0167931719301534?via%3Dihub | - |
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