Fabrication of highly sensitive capacitive pressure sensors with porous PDMS dielectric layer via microwave treatment
- Authors
- Kim, Yeongjun; Jang, Shin; Oh, Je Hoon
- Issue Date
- Jul-2019
- Publisher
- ELSEVIER
- Keywords
- Pressure sensor; Porous structures; Microwave treatment; Polydimethylsiloxane (PDMS); Surface microstructure; Capacitance
- Citation
- MICROELECTRONIC ENGINEERING, v.215, pp.1 - 7
- Indexed
- SCIE
SCOPUS
- Journal Title
- MICROELECTRONIC ENGINEERING
- Volume
- 215
- Start Page
- 1
- End Page
- 7
- URI
- https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/2437
- DOI
- 10.1016/j.mee.2019.111002
- ISSN
- 0167-9317
- Abstract
- This work aims to present a flexible, highly sensitive, capacitive pressure sensor based on an elastomeric dielectric layer with uniformly distributed micro-pores. The porous dielectric layer was simply produced by microwave treatment of polydimethylsiloxane (PDMS) mixed with a sacrificial solvent within a few minutes. The pressure sensor using a porous PDMS dielectric layer fabricated with 40 wt% sacrificial solvent had a sensitivity of 0.813 kPa(-1), which is 11 times higher than that of the sensor using a non-porous dielectric layer. To further improve the sensitivity, low-cost commercial glass was used as a mold to form microstructures on the surface of the porous dielectric layer. Due to the enhanced deformability, high sensitivity of 1.43 kPa(-1) and a fast response time of 70 ms was achieved. The performances of a sensor array as well as finger sensors were also demonstrated by placing light-weight objects on the array and holding a plastic cup. It would be expected that the proposed sensors could be utilized in the application of artificial skins or soft robotics.
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Collections - COLLEGE OF ENGINEERING SCIENCES > DEPARTMENT OF MECHANICAL ENGINEERING > 1. Journal Articles
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