이류체 노즐을 이용한 FPD 세정시스템 및 공정 개발Optimization of FPD Cleaning System and Processing by Using a Two-Phase Flow Nozzle
- Other Titles
- Optimization of FPD Cleaning System and Processing by Using a Two-Phase Flow Nozzle
- Authors
- 김민수; 김향란; 김현태; 박진구
- Issue Date
- 2014
- Publisher
- 한국재료학회
- Keywords
- flat panel display; two-phase flow nozzle; air-knife; particle removal
- Citation
- Korean Journal of Materials Research, v.24, no.8, pp.429 - 433
- Indexed
- SCOPUS
KCI
- Journal Title
- Korean Journal of Materials Research
- Volume
- 24
- Number
- 8
- Start Page
- 429
- End Page
- 433
- URI
- https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/24617
- DOI
- 10.3740/MRSK.2014.24.8.429
- ISSN
- 1225-0562
- Abstract
- As the fabrication technology used in FPDs(flat-panel displays) advances, the size of these panels is increasing andthe pattern size is decreasing to the um range. Accordingly, a cleaning process during the FPD fabrication process is becomingmore important to prevent yield reductions. The purpose of this study is to develop a FPD cleaning system and a cleaningprocess using a two-phase flow. The FPD cleaning system consists of two parts, one being a cleaning part which includes atwo-phase flow nozzle, and the other being a drying part which includes an air-knife and a halogen lamp. To evaluate theparticle removal efficiency by means of two-phase flow cleaning, silica particles 1.5 μm in size were contaminated onto a sixinchsilicon wafer and a four-inch glass wafer. We conducted cleaning processes under various conditions, i.e., DI water andnitrogen gas at different pressures, using a two-phase-flow nozzle with a gap distance between the nozzle and the substrate.
The drying efficiency was also tested using the air-knife with a change in the gap distance between the air-knife and thesubstrate to remove the DI water which remained on the substrate after the two-phase-flow cleaning process. We obtained highefficiency in terms of particle removal as well as good drying efficiency through the optimized conditions of the two-phaseflowcleaning and air-knife processes.
- Files in This Item
-
Go to Link
- Appears in
Collections - COLLEGE OF ENGINEERING SCIENCES > DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING > 1. Journal Articles
![qrcode](https://api.qrserver.com/v1/create-qr-code/?size=55x55&data=https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/24617)
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.