Hierarchical multi-level block copolymer patterns by multiple self-assembly
- Authors
- Jung, Hyunsung; Shin, Won Ho; Park, Tae Wan; Choi, Young Joong; Yoon, Young Joon; Park, Sung Heum; Lim, Jae-Hong; Kwon, Jung-Dae; Lee, Jung Woo; Kwon, Se-Hun; Seong, Gi Hun; Kim, Kwang Ho; Park, Woon Ik
- Issue Date
- May-2019
- Publisher
- ROYAL SOC CHEMISTRY
- Citation
- NANOSCALE, v.11, no.17, pp 8433 - 8441
- Pages
- 9
- Indexed
- SCI
SCIE
SCOPUS
- Journal Title
- NANOSCALE
- Volume
- 11
- Number
- 17
- Start Page
- 8433
- End Page
- 8441
- URI
- https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/2934
- DOI
- 10.1039/c9nr00774a
- ISSN
- 2040-3364
2040-3372
- Abstract
- Uniform, well-ordered sub-20 nm patterns can be generated by the templated self-assembly of block copolymers (BCPs) with a high Flory-Huggins interaction parameter (). However, the self-assembled BCP monolayers remain limited in the possible structural geometries. Here, we introduce a multiple self-assembly method which uses di-BCPs to produce diverse morphologies, such as dot, dot-in-honeycomb, line-on-dot, double-dot, pondering, dot-in-pondering, and line-on-pondering patterns. To improve the diversity of BCP morphological structures, we employed sphere-forming and cylinder-forming poly(styrene-block-dimethylsiloxane) (PS-b-PDMS) BCPs with a high . The self-assembled mono-layer and double-layer SiOx dot patterns were modified at a high temperature (approximate to 800 degrees C), showing hexagonally arranged (dot) and double-hexagonally arranged (pondering) SiOx patterns, respectively. We successfully obtained additional new nanostructures (big-dot, dot-in-honeycomb, line-on-dot, pondering, dot-in-pondering, and line-on-pondering types) through a second self-assembly of cylinder-forming BCPs using the dot and pondering patterns as guiding templates. This simple approach can likely be extended to the multiple self-assembly of many other BCPs with good functionality, significantly contributing to the development of various nanodevices.
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Collections - COLLEGE OF ENGINEERING SCIENCES > DEPARTMENT OF BIONANO ENGINEERING > 1. Journal Articles
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