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Selection of CVD Diamond Crystal Size on a CVD Pad Conditioner for Improved Lifetime
- Issue Date
- May-2019
- Publisher
- 대한금속·재료학회
- Keywords
- CMP pad conditioner; CVD conditioner; Diamond crystal size; Raman spectroscopy; Conditioner lifetime
- Citation
- Electronic Materials Letters, v.15, no.3, pp.357 - 362
- Indexed
- SCIE
SCOPUS
KCI
- Journal Title
- Electronic Materials Letters
- Volume
- 15
- Number
- 3
- Start Page
- 357
- End Page
- 362
- ISSN
- 1738-8090
- Abstract
- Pad conditioners are important consumables for semiconductor chemical mechanical planarization processes. Recently, a new concept has been developed to improve the performance and lifetime of a pad conditioner by depositing diamond film on a uniformly patterned substrate. In this study, we investigated the pad conditioner lifetime while varying the crystal size of the deposited diamond film, which was controlled via different methane (CH4) gas concentrations in hydrogen gas (H-2). Microcrystalline diamond (MCD) film was formed using 2% CH4 in H-2 flow and nanocrystalline diamond film (NCD) was formed with 4% CH4. The NCD film showed a longer lifetime and higher adhesion with the substrate than the MCD film. [GRAPHICS]
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Related Researcher
- Park, Jin Goo
- ERICA 공학대학 (DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING)