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단일 복합 타겟으로 스퍼터 코팅된 CIGS 박막의 형성과 열처리에 따른 미세구조 변화The Formation of CIGS Thin Films by Sputter Coating Using Single Composite Target and Change of Microstructure with Heat Treatment
- Other Titles
- The Formation of CIGS Thin Films by Sputter Coating Using Single Composite Target and Change of Microstructure with Heat Treatment
- Issue Date
- Dec-2012
- Publisher
- 한국표면공학회
- Keywords
- CIGS; Sputtering; Solar cell; Single composite target; Heat treatment; Microstructure
- Citation
- 한국표면공학회지, v.46, no.2, pp 61 - 67
- Pages
- 7
- Indexed
- KCI
- Journal Title
- 한국표면공학회지
- Volume
- 46
- Number
- 2
- Start Page
- 61
- End Page
- 67
- ISSN
- 1225-8024
- Abstract
- Thin film solar cells have attracted much attention due to their high cell efficiency, comparatively low process cost, and applicability to flexible substrates. In particular, CIGS solar cells have been widely studied and produced because they demonstrated the highest cell efficiency. However, the deposition process of CIGS films generally includes the selenization process conducted at elevated temperature using toxic H2Se gas. To avoid this selenization process, CIGS thin films were, in this study, deposited by RF sputtering using single composite CIGS target. In addition, the effects of sputtering bias voltage and heat treatment on the microstructural and morphological changes in deposited CIGS films were investigated and discussed.
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Related Researcher
- Kim, Jong ryoul
- ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)