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Effect of Hydrogen Peroxide(H2O2) in Citric Acid Based Cu Slurry on Cu CMP
- Authors
- 박진구
- Issue Date
- 8-Aug-2004
- Place
- Lake Placid, NY
- Conference Name
- 9th International Symposium on Chemical-Mechanical Planarization
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Related Researcher
- Park, Jin Goo
- ERICA 공학대학 (DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING)