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고 연마율을 위한 MEMS CMP용 Cu 슬러리의 특성평가
- Authors
- 박진구
- Issue Date
- 14-May-2004
- Place
- 강릉대학교
- Conference Name
- 2004 한국재료학회 춘계학술대회
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Related Researcher
- Park, Jin Goo
- ERICA 공학대학 (DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING)