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Adhesion of Alumina Slurry Particles on Wafer Surfaces
- Authors
- 박진구
- Issue Date
- 14-Apr-2004
- Place
- San Francisco, CA
- Conference Name
- 2004 MRS Spring Meeting
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Related Researcher
- Park, Jin Goo
- ERICA 공학대학 (DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING)