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The Removal of Nanoparticles from Submicron Trenches
- Authors
- 박진구
- Issue Date
- 1-Mar-2004
- Conference Name
- 2004 AVS 5th International Conference on Microelectronics and Interfaces
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Related Researcher
- Park, Jin Goo
- ERICA 공학대학 (DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING)