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Experimental and theoretical investigation on the relationship between AlN properties and AlN-based FBAR characteristics
- Authors
- 박진석
- Issue Date
- 16-Dec-2003
- Place
- Tampa, USA
- Conference Name
- IEEE UFFC 2003
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Related Researcher
- PARK, JIN SEOK
- ERICA 공학대학 (SCHOOL OF ELECTRICAL ENGINEERING)