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2단계 증착방법이 AlN 박막의 물성 및 체적탄성파 소자에 미치는 영향
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 박진석 | - |
| dc.date.accessioned | 2021-06-23T05:53:03Z | - |
| dc.date.available | 2021-06-23T05:53:03Z | - |
| dc.date.issued | 2003-07-21 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/31227 | - |
| dc.title | 2단계 증착방법이 AlN 박막의 물성 및 체적탄성파 소자에 미치는 영향 | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 대한전기학회 하계학술대회 | - |
| dc.citation.conferencePlace | 용평 | - |
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Related Researcher
- PARK, JIN SEOK
- ERICA 공학대학 (SCHOOL OF ELECTRICAL ENGINEERING)