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2단계 증착방법이 AlN 박막의 물성 및 체적탄성파 소자에 미치는 영향
- Authors
- 박진석
- Issue Date
- 21-Jul-2003
- Place
- 용평
- Conference Name
- 대한전기학회 하계학술대회
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Related Researcher
- PARK, JIN SEOK
- ERICA 공학대학 (SCHOOL OF ELECTRICAL ENGINEERING)