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음향방출센서 및 자기연마입자를 활용한 나노스케일 패터닝 제어기술 개발Development of Nano Scale Patterning control technology Using Acoustic Emission and Magnetic Abrasive finishing
- Other Titles
- Development of Nano Scale Patterning control technology Using Acoustic Emission and Magnetic Abrasive finishing
- Issue Date
- Nov-2012
- Publisher
- 한국정밀공학회
- Keywords
- Acoustic emission; Magnetic Abrasive finishing; Atomic Force Microscope; Nano Scale
- Citation
- 한국정밀공학회 2012년도 추계학술대회 논문집, pp 135 - 136
- Indexed
- OTHER
- Journal Title
- 한국정밀공학회 2012년도 추계학술대회 논문집
- Start Page
- 135
- End Page
- 136
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Related Researcher
- Lee, Seoung Hwan
- ERICA 공학대학 (DEPARTMENT OF MECHANICAL ENGINEERING)