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Fabrication and characterization of high frequency SAW device with IDT/ZnO/AlN/Si configuration: role of AlN buffer
- Authors
- 박진석
- Issue Date
- 28-Apr-2003
- Place
- San Diego, USA
- Conference Name
- ICMCTF 2003
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Related Researcher
- PARK, JIN SEOK
- ERICA 공학대학 (SCHOOL OF ELECTRICAL ENGINEERING)