Predicting lifetime of pellicle through heat and mechanical distortion caused by particle defect on extreme ultraviolet pellicle

오혜근

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Predicting lifetime of pellicle through heat and mechanical distortion caused by particle defect on extreme ultraviolet pellicle

Authors: 오혜근

Issue Date: 26-Feb-2020

Publisher: SPIE

Citation: SPIE 2020 Advanced Lithography

URI: https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/3165

Conference Name: SPIE 2020 Advanced Lithography

Place: San Jose, CA, USA

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Appears in Collections: COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY > DEPARTMENT OF APPLIED PHYSICS > 2. Conference Papers

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