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Effect of Hydrogen Introduction on Plasma Sulfurization of MoO3 at Low Temperature
- Authors
- 안지훈
- Issue Date
- 13-Feb-2020
- Conference Name
- 27회 반도체학술대회
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Related Researcher
- Ahn, Ji Hoon
- ERICA 공학대학 (DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING)