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Schottky diode with excellent performance for large integration density of crossbar resistive memory

Authors
Kim, Gun HwanLee, Jong HoHan, Jeong HwanSong, Seul JiSeok, Jun YeongYoon, Jung HoYoon, Kyung JeanLee, Min HwanPark, Tae JooHwang, Cheol Seong
Issue Date
May-2012
Publisher
American Institute of Physics
Keywords
EXTRACTION; RESISTANCE; NONVOLATILE MEMORY; PARAMETERS; ATOMIC LAYER DEPOSITION
Citation
Applied Physics Letters, v.100, no.21, pp 1 - 4
Pages
4
Indexed
SCI
SCIE
SCOPUS
Journal Title
Applied Physics Letters
Volume
100
Number
21
Start Page
1
End Page
4
URI
https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/32695
DOI
10.1063/1.4722784
ISSN
0003-6951
1077-3118
Abstract
A Schottky diode (SD) with Au/Pt/TiO2/Ti/Pt stacked structure were fabricated for its application to crossbar type resistive switching (RS) memory. The SDs showed a highly promising rectification ratio (similar to 2.4 x 10(6) @ +/- 2V) between forward and reverse state currents and a high forward current density (similar to 3 x 10(5) A/cm(2) @ 2 V), which is useful for highly integrated crossbar RS memory. The SD has local forward current conduction paths, which provides extremely scaled devices with an advantage. The minimization of interconnection line resistance is also important to provide sufficient current to achieve stable operation of RS memory. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4722784]
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ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)
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