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Effect of Organic Acids in Slurry on Cu CMP
- Authors
- 박진구
- Issue Date
- 21-Dec-2000
- Place
- Phoenix, USA
- Conference Name
- The Electrochemical Society Fall Symposium
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Related Researcher
- Park, Jin Goo
- ERICA 공학대학 (DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING)