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2. Conference Papers(COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY > DEPARTMENT OF APPLIED PHYSICS > 2. Conference Papers)833

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Collection's Items (Sorted by Issue Date in Descending order): 561 to 580 of 833

Nanolithography for basic science research

정희준

ConferenceIssue Date2003Place아산, 선문대학교
The extraction of development parameters by using cross-sectional critical shape error method

오혜근

ConferenceIssue Date2003CitationMicroprocesses and Nanotechnology Conference 2003Publisher일본응용물리학회Place일본 도쿄
The prediction of aerial image and CD variation due to imperfect mask in Extreme Ultraviolet lithography

오혜근

ConferenceIssue Date2003CitationMicroprocesses and Nanotechnology Conference 2003Publisher일본응용물리학회Place일본 도쿄
Effect of EUV light scattering from the rough absorber and buffer side wall

오혜근

ConferenceIssue Date2003CitationMicroprocesses and Nanotechnology Conference 2003Publisher일본응용물리학회Place일본 도쿄
Prediction of High NA ArF lithography capabilities for 70nm technology node using simulation

오혜근

ConferenceIssue Date2003CitationMicroprocesses and Nanotechnology Conference 2003Publisher일본응용물리학회Place일본 도쿄
Screening Effect on Resonant Charge-Exchange Collisions in Strongly Coupled Plasmas

정영대

ConferenceIssue Date2003Place경북대학교
Quantum size effect in grid type GaAs infrared detectors

정희준

ConferenceIssue Date2003Place대구, 경북대
Benchmark our simulation tool(LUV) with other commercial simulation tools

오혜근

ConferenceIssue Date2003Citation2003 년도 한국물리학회 추계학술대회Publisher한국물리학회Place대구 경북대
Immersion Lithography를 위한 조명계 설계

오혜근

ConferenceIssue Date2003Citation2003 년도 한국물리학회 추계학술대회Publisher한국물리학회Place대구 경북대
EUV(Extreme Ultraviolet) 리소그래피에서 단차가 있는 마스크에서의 CD 변화 전산모사

오혜근

ConferenceIssue Date2003Citation2003 년도 한국물리학회 추계학술대회Publisher한국물리학회Place대구 경북대
Mask feature optimization by comparing the wafer critical dimension

오혜근

ConferenceIssue Date2003Citation2003 년도 한국물리학회 추계학술대회Publisher한국물리학회Place대구, 경북대
Rotating compensator spectroscopic ellipsometry를 이용한 Post Exposure Bake 변수 추출

오혜근

ConferenceIssue Date2003Citation2003 년도 한국물리학회 추계학술대회Publisher한국물리학회Place대구 경북대
Qunatum teleportation with w and ghz states from rest too parties to a uniformly party accelerated

권영헌

ConferenceIssue Date2003Place경북대학교
SNR변화에 따른 음성인식률 비교

권영헌

ConferenceIssue Date2003Place경북대학교
Effect of EUV scattering from the rough absorber and buffer side

오혜근

ConferenceIssue Date2003Citation2nd International Extreme UltraViolet SymposiumPublisherInternational SEMATECHPlaceAntwerp, Belgium
Analysis of uneven EUV mask structure

오혜근

ConferenceIssue Date2003Citation2nd International Extreme UltraViolet SymposiumPublisherInternational SEMATECHPlaceAntwerp, Belgium
Resonant Change-Exchange Processes in Classical Nonideal Plasmas

정영대

ConferenceIssue Date2003PlaceLotte Hotel, Jeju
Radiative Recombination Processes in Classical Nonideal Plasmas

정영대

ConferenceIssue Date2003PlaceLotte Hotel, Jeju
Return-path ellipsometry의 Jones matrix와 Muller matrix

오혜근

ConferenceIssue Date2003Citation한국물리학회 2003 년 춘계물리학회Publisher한국물리학회Place연세대학교, 서울
2 mirror optics for EUVL

오혜근

ConferenceIssue Date2003Citation한국물리학회 2003 년 춘계물리학회Publisher한국물리학회Place연세대학교, 서울
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