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Chemical, optical and tribological characterization of perfluoropolymer films as an snti-stiction layer in micromirror arrays
- Authors
- 박진구
- Issue Date
- 10-Apr-2000
- Conference Name
- Internatinal conference on metallurgical coatings and thin films
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Related Researcher
- Park, Jin Goo
- ERICA 공학대학 (DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING)