Evaluation of glass lapping using fixed abrasive pad
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kim, Hyuk min | - |
dc.contributor.author | Manivannan, R. | - |
dc.contributor.author | Moon, Deog ju | - |
dc.contributor.author | Kwon, Tae young | - |
dc.contributor.author | Noh, Jin hyeong | - |
dc.contributor.author | Park, Jin goo | - |
dc.date.accessioned | 2021-06-23T08:07:44Z | - |
dc.date.available | 2021-06-23T08:07:44Z | - |
dc.date.created | 2021-05-11 | - |
dc.date.issued | 2012 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/33933 | - |
dc.description.abstract | Glass ceramics is one of the key materials for the optoelectronic devices. In this work, double-sided lapping experiments were performed for various glass substrates (Borofloat, BK7, Quartz) using fixed abrasive pad with deionized water as coolant and the removal rate, hardness and roughness were reported at a lapping pressure of 0.6kgf/cm2 and speed of 50 rpm. We found that the material removal rate is dominantly influenced by the mechanical properties of the substrate. The higher removal rate seen in the case of borofloat when compared to the other two substrates is due to the lower hardness. The glass studied in this work follows the two body brittle fracture mechanism, based on the calculation obtained using the residue size and the mechanical properties of the glass. | - |
dc.language | 영어 | - |
dc.language.iso | en | - |
dc.publisher | VDE Verlag GmbH | - |
dc.title | Evaluation of glass lapping using fixed abrasive pad | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Park, Jin goo | - |
dc.identifier.scopusid | 2-s2.0-85099451344 | - |
dc.identifier.bibliographicCitation | ICPT 2012 - International Conference on Planarization/CMP Technology, Proceedings, pp.409 - 414 | - |
dc.relation.isPartOf | ICPT 2012 - International Conference on Planarization/CMP Technology, Proceedings | - |
dc.citation.title | ICPT 2012 - International Conference on Planarization/CMP Technology, Proceedings | - |
dc.citation.startPage | 409 | - |
dc.citation.endPage | 414 | - |
dc.type.rims | ART | - |
dc.type.docType | Conference Paper | - |
dc.description.journalClass | 1 | - |
dc.description.isOpenAccess | N | - |
dc.description.journalRegisteredClass | scopus | - |
dc.subject.keywordPlus | Deionized water | - |
dc.subject.keywordPlus | Glass ceramics | - |
dc.subject.keywordPlus | Hardness | - |
dc.subject.keywordPlus | Lapping | - |
dc.subject.keywordPlus | Optoelectronic devices | - |
dc.subject.keywordPlus | Substrates | - |
dc.subject.keywordPlus | Brittle fracture mechanism | - |
dc.subject.keywordPlus | Fixed abrasives | - |
dc.subject.keywordPlus | Glass substrates | - |
dc.subject.keywordPlus | Key materials | - |
dc.subject.keywordPlus | Lapping pressure | - |
dc.subject.keywordPlus | Lower hardness | - |
dc.subject.keywordPlus | Material removal rate | - |
dc.subject.keywordPlus | Removal rate | - |
dc.subject.keywordPlus | Abrasives | - |
dc.subject.keywordAuthor | Diamond | - |
dc.subject.keywordAuthor | Fixed abrasive pad | - |
dc.subject.keywordAuthor | Glass | - |
dc.subject.keywordAuthor | Lapping | - |
dc.subject.keywordAuthor | Self-dressing | - |
dc.identifier.url | https://ieeexplore.ieee.org/document/6353817 | - |
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