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Evaluation of glass lapping using fixed abrasive pad

Authors
Kim, Hyuk minManivannan, R.Moon, Deog juKwon, Tae youngNoh, Jin hyeongPark, Jin goo
Issue Date
2012
Publisher
VDE Verlag GmbH
Keywords
Diamond; Fixed abrasive pad; Glass; Lapping; Self-dressing
Citation
ICPT 2012 - International Conference on Planarization/CMP Technology, Proceedings, pp.409 - 414
Indexed
SCOPUS
Journal Title
ICPT 2012 - International Conference on Planarization/CMP Technology, Proceedings
Start Page
409
End Page
414
URI
https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/33933
Abstract
Glass ceramics is one of the key materials for the optoelectronic devices. In this work, double-sided lapping experiments were performed for various glass substrates (Borofloat, BK7, Quartz) using fixed abrasive pad with deionized water as coolant and the removal rate, hardness and roughness were reported at a lapping pressure of 0.6kgf/cm2 and speed of 50 rpm. We found that the material removal rate is dominantly influenced by the mechanical properties of the substrate. The higher removal rate seen in the case of borofloat when compared to the other two substrates is due to the lower hardness. The glass studied in this work follows the two body brittle fracture mechanism, based on the calculation obtained using the residue size and the mechanical properties of the glass.
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Park, Jin Goo
ERICA 공학대학 (DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING)
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