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반도체 세정액내에서의 과산화수소수 첨가에 의한 실리콘 웨이퍼의 접촉성 변화
- Authors
- 박진구
- Issue Date
- 1-May-1998
- Conference Name
- 한국재료학회
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Related Researcher
- Park, Jin Goo
- ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)