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고 스트레스를 갖는 금속막의 습식전해 증착법(Electrodeposition)을 이용한 결정질 실리콘(c-Si) 박막 박리 방법Lift-off of single crystal Si layers with high stress electrodeposited metal layer
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- Lift-off of single crystal Si layers with high stress electrodeposited metal layer
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- Lee, Jung-Ho
- ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)