High-Performance, Transparent Thin Film Hydrogen Gas Sensor Using 2D Electron Gas at Interface of Oxide Thin Film Heterostructure Grown by Atomic Layer Deposition
- Authors
- Kim, Sung Min; Kim, Hye Ju; Jung, Hae Jun; Park, Ji-Yong; Seok, Tae Jun; Choa, Yong-Ho; Park, Tae Joo; Lee, Sang Woon
- Issue Date
- Feb-2019
- Publisher
- John Wiley & Sons Ltd.
- Keywords
- atomic layer deposition; gas sensor; hydrogen; oxide heterostructure; thin film
- Citation
- Advanced Functional Materials, v.29, no.7, pp.1 - 8
- Indexed
- SCIE
SCOPUS
- Journal Title
- Advanced Functional Materials
- Volume
- 29
- Number
- 7
- Start Page
- 1
- End Page
- 8
- URI
- https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/3492
- DOI
- 10.1002/adfm.201807760
- ISSN
- 1616-301X
- Abstract
- A high-performance, transparent, and extremely thin (<15 nm) hydrogen (H-2) gas sensor is developed using 2D electron gas (2DEG) at the interface of an Al2O3/TiO2 thin film heterostructure grown by atomic layer deposition (ALD), without using an epitaxial layer or a single crystalline substrate. Palladium nanoparticles (approximate to 2 nm in thickness) are used on the surface of the Al2O3/TiO2 thin film heterostructure to detect H-2. This extremely thin gas sensor can be fabricated on general substrates such as a quartz, enabling its practical application. Interestingly, the electron density of the Al2O3/TiO2 thin film heterostructure can be tailored using ALD process temperature in contrast to 2DEG at the epitaxial interfaces of the oxide heterostructures such as LaAlO3/SrTiO3. This tunability provides the optimal electron density for H-2 detection. The Pd/Al2O3/TiO2 sensor detects H-2 gas quickly with a short response time of <30 s at 300 K which outperforms conventional H-2 gas sensors, indicating that heating modules are not required for the rapid detection of H-2. A wide bandgap (>3.2 eV) with the extremely thin film thickness allows for a transparent sensor (transmittance of 83% in the visible spectrum) and this fabrication scheme enables the development of flexible gas sensors.
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