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Surface modification with perfluoro-carbon organic thin films for the preventionof stiction in MEMS
- Authors
- 박진구
- Issue Date
- 1-Apr-1998
- Conference Name
- MRS spring meeting
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Related Researcher
- Park, Jin Goo
- ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)