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Characteristics of plasma extraction_filtered vacuum arc source(FVAS) and_deposited film property

Authors
박진석
Issue Date
1-Oct-1997
URI
https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/35346
Conference Name
AEPSE 97
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COLLEGE OF ENGINEERING SCIENCES > SCHOOL OF ELECTRICAL ENGINEERING > 2. Conference Papers

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PARK, JIN SEOK
ERICA 공학대학 (SCHOOL OF ELECTRICAL ENGINEERING)
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