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반도체 습식공정에서 실리콘표면에 접촉성과 건조조건이 WATER MARK생성에 미치는영향
- Authors
- 박진구
- Issue Date
- 1-Nov-1996
- Conference Name
- 한국 표면공학회지
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Related Researcher
- Park, Jin Goo
- ERICA 공학대학 (DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING)