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TMEMM 공정 시 Insulation shield jig, surfactant(ADS)에 의한 균일도 향상Improved uniformity by Insulation shield jig and surfactant (ADS) during TMEMM process
- Alternative Title
- Improved uniformity by Insulation shield jig and surfactant (ADS) during TMEMM process
- Authors
- 박진구[박진구]
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Related Researcher
- Park, Jin Goo
- ERICA 공학대학 (DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING)