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질화갈륨 기판의 N 표면용 세정용액 및 이를 이용한 질화갈륨 기판의 N 표면 세정방법Cleaning solution for nitrogen surface of GaN substrate and method of cleaning nitrogen surface of GaN substrate using the same

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Cleaning solution for nitrogen surface of GaN substrate and method of cleaning nitrogen surface of GaN substrate using the same
Authors
박진구[박진구]
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https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/37085
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COLLEGE OF ENGINEERING SCIENCES > DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING > 4. Patents

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ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)
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