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형상 및 배열이 조절 가능한 실리콘 나노팁 어레이 제작방법Fabrication Method of shape and arrangement controllable Si nanotip array

Alternative Title
Fabrication Method of shape and arrangement controllable Si nanotip array
Authors
박진구[박진구]
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https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/37091
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COLLEGE OF ENGINEERING SCIENCES > DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING > 4. Patents

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ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)
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