Measurement of local pellicle thinning and line-width variation with different pellicle thicknesses

오혜근

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Measurement of local pellicle thinning and line-width variation with different pellicle thicknesses

Authors: 오혜근

Issue Date: 4-Apr-2011

Publisher: SPIE

Citation: Proceedings of SPIE, v.7973

Journal Title: Proceedings of SPIE

Volume: 7973

URI: https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/38143

ISSN: 0277786x

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Appears in Collections: COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY > DEPARTMENT OF APPLIED PHYSICS > 1. Journal Articles

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