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Effect of polish by-products on chemical mechanical planarization defects
- Authors
- 박진구
- Issue Date
- 19-Nov-2009
- Publisher
- Japan planarization and CMP technical committee
- Citation
- 2009 ICPT
- Journal Title
- 2009 ICPT
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Related Researcher
- Park, Jin Goo
- ERICA 공학대학 (DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING)