Study of Compositional Change In FC(Fluorinated Carbon)Film with Variation in Substrate Temperature

Abstract

We have studied the effect of substrate temperature on FC(Fluorinated carbon) film. Fluorinated carbon(FC) is a chemical compound that contains carbon-fluorine bonds. FC film has a hydrophobic property. FC film was deposited by PECVD(plasma enhancedchemical vapor deposition) using C4F8 (Octafluorocyclobutane) precursor. After film was deposited, contact angle, surface energy and thickness were measured. Organic chemical analysis using FTIR(Fourier Transform Infrared Spectrometer)and Chemical bonding analysis using XPS(X-ray Photoelectron Spectroscopy) were performed. BTIR and XPS results showed some differences among samplesFTIR results showed extra peaks for samples deposited at 25oC and 100 oC substrate temperatures. XPS results showed that C=O bond was detected for the sample deposited at 250 oC substrate temperature.