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An Embedded Wide-Band Spiral Inductor for 10 Gb/s Optical Transceiver Applications

Authors
권영미김동철심종인
Issue Date
Mar-2008
Publisher
한국광학회
Citation
Current Optics and Photonics, v.12, no.1, pp.49 - 51
Indexed
KCI
Journal Title
Current Optics and Photonics
Volume
12
Number
1
Start Page
49
End Page
51
URI
https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/42980
DOI
10.3807/JOSK.2008.12.1.049
ISSN
2508-7266
Abstract
The wide-band spiral inductor to be monolithically integrated on the AlN substrate as a choking inductor for a compact 10 Gb/s optical transmitter applications is investigated. In order to reduce the parasitic capacitance limiting the choking bandwidth, the AlN substrate is partially etched away, which is analyzed by using an equivalent circuit model. The measured S21 transmission response of the fabricated inductor is suppressed as low as -10 dB in the frequency range of 5 to 16 GHz.
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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY (DEPARTMENT OF PHOTONICS AND NANOELECTRONICS)
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