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새로운 공정을 이용한 AlN 체적 탄성파 소자의 제작 및 다양한 금속 전극막에 따른 주파수 응답 특성 분석
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 김보현 | - |
| dc.contributor.author | 박창균 | - |
| dc.contributor.author | 박진석 | - |
| dc.date.accessioned | 2021-06-23T20:37:50Z | - |
| dc.date.available | 2021-06-23T20:37:50Z | - |
| dc.date.created | 2021-02-01 | - |
| dc.date.issued | 2007-05 | - |
| dc.identifier.issn | 1229-2443 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/44121 | - |
| dc.language | 한국어 | - |
| dc.language.iso | ko | - |
| dc.publisher | 대한전기학회 | - |
| dc.title | 새로운 공정을 이용한 AlN 체적 탄성파 소자의 제작 및 다양한 금속 전극막에 따른 주파수 응답 특성 분석 | - |
| dc.title.alternative | Fabrication of AlN-based FBAR Devices by Using a Novel Process and Characterization of Their Frequency Response Characteristics in terms of Various Electrode Metals | - |
| dc.type | Article | - |
| dc.contributor.affiliatedAuthor | 박진석 | - |
| dc.identifier.scopusid | 2-s2.0-35548968463 | - |
| dc.identifier.bibliographicCitation | 전기학회논문지ABCD, v.56, no.5, pp.915 - 920 | - |
| dc.relation.isPartOf | 전기학회논문지ABCD | - |
| dc.citation.title | 전기학회논문지ABCD | - |
| dc.citation.volume | 56 | - |
| dc.citation.number | 5 | - |
| dc.citation.startPage | 915 | - |
| dc.citation.endPage | 920 | - |
| dc.type.rims | ART | - |
| dc.identifier.kciid | ART001051771 | - |
| dc.description.journalClass | 1 | - |
| dc.description.isOpenAccess | N | - |
| dc.description.journalRegisteredClass | scopus | - |
| dc.description.journalRegisteredClass | kci | - |
| dc.subject.keywordAuthor | Aluminum nitride (AlN) | - |
| dc.subject.keywordAuthor | Film bulk acoustic resonator (FBAR) | - |
| dc.subject.keywordAuthor | Membrane-structure | - |
| dc.subject.keywordAuthor | Metal electrode | - |
| dc.subject.keywordAuthor | Mass-loading effect | - |
| dc.subject.keywordAuthor | Frequency response.1. 서 론*學生會員 : 漢陽大學 電子電氣制御計測工學科 工學碩士 | - |
| dc.subject.keywordAuthor | Aluminum nitride (AlN) | - |
| dc.subject.keywordAuthor | Film bulk acoustic resonator (FBAR) | - |
| dc.subject.keywordAuthor | Membrane-structure | - |
| dc.subject.keywordAuthor | Metal electrode | - |
| dc.subject.keywordAuthor | Mass-loading effect | - |
| dc.subject.keywordAuthor | Frequency response.1. 서 론*學生會員 : 漢陽大學 電子電氣制御計測工學科 工學碩士 | - |
| dc.identifier.url | https://www.kci.go.kr/kciportal/ci/sereArticleSearch/ciSereArtiView.kci?sereArticleSearchBean.artiId=ART001051771 | - |
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Related Researcher
- PARK, JIN SEOK
- ERICA 공학대학 (SCHOOL OF ELECTRICAL ENGINEERING)