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PZT를 이용한Semi-inchworm구동기법의 초정밀 회전 스테이지 개발Development of ultra precision rotational stage using Semi-inchworm driving mechanism with PZT
- Other Titles
- Development of ultra precision rotational stage using Semi-inchworm driving mechanism with PZT
- Issue Date
- Mar-2007
- Publisher
- 한국반도체디스플레이기술학회
- Keywords
- Rotational stage; Impact drive; Inchworm drive; PZT; Semi-inchworm; Rotational stage; Impact drive; Inchworm drive; PZT; Semi-inchworm
- Citation
- 반도체디스플레이기술학회지, v.6, no.1, pp.37 - 41
- Indexed
- KCI
OTHER
- Journal Title
- 반도체디스플레이기술학회지
- Volume
- 6
- Number
- 1
- Start Page
- 37
- End Page
- 41
- ISSN
- 1738-2270
- Abstract
- Recently PZT is used in ultra precision mechanism field. PZT has a small motion range although it has a high resolution. Many methods, such as inchworm, impact driving, etc., have been applied for the expansion of the motion range.In this study, the new actuating mechanism for rotational motion with two PZT actuators is proposed. The ultra precision rotational actuator which is made by proposed mechanism is able to operate both coarse and fine motion. The design parameters of the proposed mechanism are considered to improve the performance of the system. The rotational stage which is applied by the proposed mechanism is fabricated. The resolution and velocity for fabricated rotational stage are measured by laser interferometer.
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