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A Dual-Servo Type VCM for a Nano-Level Measurement System

Authors
Yong-Min Yoo권병일
Issue Date
Mar-2007
Publisher
대한전기학회
Keywords
Dual-servo; Finite element analysis; Measurement system; Voice coil motor
Citation
Journal of Electrical Engineering & Technology, v.2, no.1, pp.50 - 54
Indexed
KCI
Journal Title
Journal of Electrical Engineering & Technology
Volume
2
Number
1
Start Page
50
End Page
54
URI
https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/44162
ISSN
1975-0102
Abstract
- In this paper, a dual-servo type VCM (Voice Coil Motor) for the measuring of nano-leveldisplacement and small thrust is proposed and developed. The shape of VCM for improving the resolution of displacement and ensuring a large displacement are presented. The FEM (finite element method) is utilized to analyze the characteristics of VCM that produces linear driving thrust and satisfies the thrust that the measurement system requires. The Prototype is fabricated and an experiment is performed in order to measure displacement. As a result of simulation and testing, the proposed VCM shows the applicable possibility for a nano-level measurement system.
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COLLEGE OF ENGINEERING SCIENCES > SCHOOL OF ELECTRICAL ENGINEERING > 1. Journal Articles

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