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Characteristics of high power laser shock waves and their cleaning performance
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Kim, Tae Gon | - |
| dc.contributor.author | Yoo, Young Sam | - |
| dc.contributor.author | Son, Il Ryong | - |
| dc.contributor.author | Jang, Deoksuk | - |
| dc.contributor.author | Kim, Dongsik | - |
| dc.contributor.author | Lee, Jong Myung | - |
| dc.contributor.author | Choi, Jae Sung | - |
| dc.contributor.author | Busnaina, Ahmed .A. | - |
| dc.contributor.author | Park, Jin-Goo | - |
| dc.date.accessioned | 2021-06-23T20:40:53Z | - |
| dc.date.available | 2021-06-23T20:40:53Z | - |
| dc.date.issued | 2007-00 | - |
| dc.identifier.issn | 1938-5862 | - |
| dc.identifier.issn | 1938-6737 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/44249 | - |
| dc.description.abstract | Plasma shock waves induced by focusing a Q-switched Nd:YAG laser at a maximum energy of 1.8 J in air were characterized by a laser beam deflection method and applied to the particle removal. The dimension of plasma plume and velocities of shock waves were measured as a function of laser energy and gap distance. The shock wave velocity decayed rapidly as the gap distance increased. The laser shock wave cleaned area followed the shape of shock waves, which was heart-shaped. The shorter gap distance, the higher particle removal efficiency (PRE) was observed. PRE of 98% was achieved by optimizing the laser energy, gap distance, and wafer scanning procedure. ©The Electrochemical Society. | - |
| dc.format.extent | 6 | - |
| dc.language | 영어 | - |
| dc.language.iso | ENG | - |
| dc.publisher | Electrochemical Society, Inc. | - |
| dc.title | Characteristics of high power laser shock waves and their cleaning performance | - |
| dc.type | Article | - |
| dc.publisher.location | 미국 | - |
| dc.identifier.doi | 10.1149/1.2779360 | - |
| dc.identifier.scopusid | 2-s2.0-45249101783 | - |
| dc.identifier.bibliographicCitation | ECS Transactions, v.11, no.2, pp 41 - 46 | - |
| dc.citation.title | ECS Transactions | - |
| dc.citation.volume | 11 | - |
| dc.citation.number | 2 | - |
| dc.citation.startPage | 41 | - |
| dc.citation.endPage | 46 | - |
| dc.type.docType | Conference Paper | - |
| dc.description.isOpenAccess | N | - |
| dc.description.journalRegisteredClass | scopus | - |
| dc.subject.keywordPlus | (OTDR) technology | - |
| dc.subject.keywordPlus | Applied (CO) | - |
| dc.subject.keywordPlus | Electrochemical Society (ECS) | - |
| dc.subject.keywordPlus | gap distances | - |
| dc.subject.keywordPlus | High powers | - |
| dc.subject.keywordPlus | International symposium | - |
| dc.subject.keywordPlus | Laser beam deflection method (LBDM) | - |
| dc.subject.keywordPlus | Laser energies | - |
| dc.subject.keywordPlus | Laser shock waves | - |
| dc.subject.keywordPlus | maximum energy | - |
| dc.subject.keywordPlus | particle removal | - |
| dc.subject.keywordPlus | Particle-removal efficiency (PRE) | - |
| dc.subject.keywordPlus | Plasma plumes | - |
| dc.subject.keywordPlus | Q switched Nd:YAG lasers | - |
| dc.subject.keywordPlus | Semi-conductor cleaning | - |
| dc.subject.keywordPlus | Shock wave velocity | - |
| dc.subject.keywordPlus | Surface conditioning | - |
| dc.subject.keywordPlus | Air cleaners | - |
| dc.subject.keywordPlus | Blood vessel prostheses | - |
| dc.subject.keywordPlus | Computer networks | - |
| dc.subject.keywordPlus | Electric conductivity | - |
| dc.subject.keywordPlus | Gallium alloys | - |
| dc.subject.keywordPlus | High power lasers | - |
| dc.subject.keywordPlus | Laser beams | - |
| dc.subject.keywordPlus | Lasers | - |
| dc.subject.keywordPlus | Neodymium | - |
| dc.subject.keywordPlus | Particle size | - |
| dc.subject.keywordPlus | Plasma (human) | - |
| dc.subject.keywordPlus | Plasmas | - |
| dc.subject.keywordPlus | Pulsed laser deposition | - |
| dc.subject.keywordPlus | Removal | - |
| dc.subject.keywordPlus | Scanning | - |
| dc.subject.keywordPlus | Semiconductor device manufacture | - |
| dc.subject.keywordPlus | Semiconductor device models | - |
| dc.subject.keywordPlus | Semiconductor devices | - |
| dc.subject.keywordPlus | Semiconductor lasers | - |
| dc.subject.keywordPlus | Semiconductor materials | - |
| dc.subject.keywordPlus | Semiconductor switches | - |
| dc.subject.keywordPlus | Shock waves | - |
| dc.subject.keywordPlus | Solid state lasers | - |
| dc.subject.keywordPlus | Surface cleaning | - |
| dc.subject.keywordPlus | Surfaces | - |
| dc.subject.keywordPlus | Technology | - |
| dc.subject.keywordPlus | Waves | - |
| dc.identifier.url | https://iopscience.iop.org/article/10.1149/1.2779360 | - |
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Related Researcher
- Park, Jin Goo
- ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)