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Characteristics of high power laser shock waves and their cleaning performance
- Authors
- Kim, Tae Gon; Yoo, Young Sam; Son, Il Ryong; Jang, Deoksuk; Kim, Dongsik; Lee, Jong Myung; Choi, Jae Sung; Busnaina, Ahmed .A.; Park, Jin-Goo
- Issue Date
- Dec-2006
- Publisher
- Electrochemical Society, Inc.
- Citation
- ECS Transactions, v.11, no.2, pp 41 - 46
- Pages
- 6
- Indexed
- SCOPUS
- Journal Title
- ECS Transactions
- Volume
- 11
- Number
- 2
- Start Page
- 41
- End Page
- 46
- ISSN
- 1938-5862
1938-6737
- Abstract
- Plasma shock waves induced by focusing a Q-switched Nd:YAG laser at a maximum energy of 1.8 J in air were characterized by a laser beam deflection method and applied to the particle removal. The dimension of plasma plume and velocities of shock waves were measured as a function of laser energy and gap distance. The shock wave velocity decayed rapidly as the gap distance increased. The laser shock wave cleaned area followed the shape of shock waves, which was heart-shaped. The shorter gap distance, the higher particle removal efficiency (PRE) was observed. PRE of 98% was achieved by optimizing the laser energy, gap distance, and wafer scanning procedure. ©The Electrochemical Society.
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Related Researcher
- KIM, TAE GON
- ERICA 공학대학 (MAJOR IN APPLIED MATERIAL & COMPONENTS)