Fabrication of nano- and micro-scale UV imprint stamp using diamond-like carbon coating technology
DC Field | Value | Language |
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dc.contributor.author | Lee, Eung-Sug | - |
dc.contributor.author | Jeong, Jun-Ho | - |
dc.contributor.author | Kim, Ki-Don | - |
dc.contributor.author | Sim, Young-Suk | - |
dc.contributor.author | Choi, Dae-Geun | - |
dc.contributor.author | Choi, Junhyuk | - |
dc.contributor.author | Park, Sang-Hu | - |
dc.contributor.author | Lim, Tae-Woo | - |
dc.contributor.author | Yang, Dong-Yol | - |
dc.contributor.author | Cha, Nam-Goo | - |
dc.contributor.author | Park, Jin-Goo | - |
dc.contributor.author | Lee, Wi-Ro | - |
dc.date.accessioned | 2021-06-23T21:04:39Z | - |
dc.date.available | 2021-06-23T21:04:39Z | - |
dc.date.created | 2021-01-21 | - |
dc.date.issued | 2006-11 | - |
dc.identifier.issn | 1533-4880 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/44557 | - |
dc.description.abstract | Two-dimensional (2-D) and three-dimensional (3-D) diamond-like carbon (DLC) stamps for ultraviolet nanoimprint lithography were fabricated with two methods: namely, a DLC coating process, followed by focused ion beam lithography; and two-photon polymerization patterning, followed by nanoscale-thick DLC coating. We used focused ion beam lithography to fabricate 70 nm deep lines with a width of 100 nm, as well as 70 nm deep lines with a width of 150 nm, on 100 nm thick DLC layers coated on quartz substrates. We also used two-photon polymerization patterning and a DLC coating process to successfully fabricate 200 nm wide lines, as well as 3-D rings with a diameter of 1.35 mu m and a height of 1.97 mu m, and a 3-D cone with a bottom diameter of 2.88 mu m and a height of 1.97 mu m. The wafers were successfully printed on an UV-NIL using the DLC stamps without an anti-adhesive layer. The correlation between the dimensions of the stamp's features and the corresponding imprinted features was excellent. | - |
dc.language | 영어 | - |
dc.language.iso | en | - |
dc.publisher | American Scientific Publishers | - |
dc.title | Fabrication of nano- and micro-scale UV imprint stamp using diamond-like carbon coating technology | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Park, Jin-Goo | - |
dc.identifier.doi | 10.1166/jnn.2006.068 | - |
dc.identifier.scopusid | 2-s2.0-33845746362 | - |
dc.identifier.wosid | 000242601000069 | - |
dc.identifier.bibliographicCitation | Journal of Nanoscience and Nanotechnology, v.6, no.11, pp.3619 - 3623 | - |
dc.relation.isPartOf | Journal of Nanoscience and Nanotechnology | - |
dc.citation.title | Journal of Nanoscience and Nanotechnology | - |
dc.citation.volume | 6 | - |
dc.citation.number | 11 | - |
dc.citation.startPage | 3619 | - |
dc.citation.endPage | 3623 | - |
dc.type.rims | ART | - |
dc.type.docType | Article; Proceedings Paper | - |
dc.description.journalClass | 1 | - |
dc.description.isOpenAccess | N | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Chemistry | - |
dc.relation.journalResearchArea | Science & Technology - Other Topics | - |
dc.relation.journalResearchArea | Materials Science | - |
dc.relation.journalResearchArea | Physics | - |
dc.relation.journalWebOfScienceCategory | Chemistry, Multidisciplinary | - |
dc.relation.journalWebOfScienceCategory | Nanoscience & Nanotechnology | - |
dc.relation.journalWebOfScienceCategory | Materials Science, Multidisciplinary | - |
dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
dc.relation.journalWebOfScienceCategory | Physics, Condensed Matter | - |
dc.subject.keywordPlus | MOLD | - |
dc.subject.keywordAuthor | UV-imprint lithography | - |
dc.subject.keywordAuthor | diamond-like carbon | - |
dc.subject.keywordAuthor | stamp | - |
dc.subject.keywordAuthor | focused ion beam | - |
dc.identifier.url | https://www.ingentaconnect.com/content/asp/jnn/2006/00000006/00000011/art00069;jsessionid=1hmymyb5d2vx9.x-ic-live-03# | - |
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