코로나 방전을 이용한 진공 내 실시간 입자 모니터링 시스템의 개발 및 성능 평가

안강호

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코로나 방전을 이용한 진공 내 실시간 입자 모니터링 시스템의 개발 및 성능 평가

Authors: 안강호

Issue Date: 7-Jul-2005

Publisher: 한국입자에어로졸학회

Citation: 6th Korean Conference on Aerosol and Particle Technology

Journal Title: 6th Korean Conference on Aerosol and Particle Technology

URI: https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/45806

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Appears in Collections: COLLEGE OF ENGINEERING SCIENCES > DEPARTMENT OF MECHANICAL ENGINEERING > 1. Journal Articles

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