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Ohmic contacts of Pd/Zn/M(= Pd or Pt)/Au to p-type InP
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Hwang, Sungmin | - |
| dc.contributor.author | Shim, Jongin | - |
| dc.contributor.author | Eo, Yungseon | - |
| dc.date.accessioned | 2021-06-23T23:39:25Z | - |
| dc.date.available | 2021-06-23T23:39:25Z | - |
| dc.date.issued | 2005-04 | - |
| dc.identifier.issn | 0374-4884 | - |
| dc.identifier.issn | 1976-8524 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/46035 | - |
| dc.description.abstract | We have investigated the ohmic properties of Au/M(= Pd or Pt)/Zn/Pd/p-InP, focusing on the role of the third metal M in Au-free metallization. Both the lowest specific contact resistivity of 7 x 10(-6) Omega(.)cm(2) and a flat diffusion front were obtained for a sample with a Au/Pt/Zn/Pd/p-InP contact material after annealing at 400 degrees C for 4 min, indicating that the Pt layer was more effective than the Pd layer in preventing Zn out-diffusion during the annealing process. In addition to Au-free metallizations, we fabricated the Au-based metallization of Au/Cr/AuZn/Au/p-lnP in order to justify our ohmic contact process, and we compared its ohmic characteristics. | - |
| dc.format.extent | 5 | - |
| dc.language | 영어 | - |
| dc.language.iso | ENG | - |
| dc.publisher | 한국물리학회 | - |
| dc.title | Ohmic contacts of Pd/Zn/M(= Pd or Pt)/Au to p-type InP | - |
| dc.type | Article | - |
| dc.publisher.location | 대한민국 | - |
| dc.identifier.scopusid | 2-s2.0-17744366620 | - |
| dc.identifier.wosid | 000228458900003 | - |
| dc.identifier.bibliographicCitation | Journal of the Korean Physical Society, v.46, no.4, pp 751 - 755 | - |
| dc.citation.title | Journal of the Korean Physical Society | - |
| dc.citation.volume | 46 | - |
| dc.citation.number | 4 | - |
| dc.citation.startPage | 751 | - |
| dc.citation.endPage | 755 | - |
| dc.type.docType | Letter | - |
| dc.identifier.kciid | ART000951874 | - |
| dc.description.isOpenAccess | N | - |
| dc.description.journalRegisteredClass | scie | - |
| dc.description.journalRegisteredClass | scopus | - |
| dc.description.journalRegisteredClass | kci | - |
| dc.relation.journalResearchArea | Physics | - |
| dc.relation.journalWebOfScienceCategory | Physics, Multidisciplinary | - |
| dc.subject.keywordPlus | SCHEME | - |
| dc.subject.keywordAuthor | ohmic contact | - |
| dc.subject.keywordAuthor | p-InP | - |
| dc.subject.keywordAuthor | Au/Pt/Zn/Pd/p-InP | - |
| dc.subject.keywordAuthor | Au/Cr/AuZn/Au/p-InP | - |
| dc.identifier.url | https://www.jkps.or.kr/journal/download_pdf.php?spage=751&volume=46&number=4 | - |
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Related Researcher
- Shim, Jong In
- COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY (DEPARTMENT OF PHOTONICS AND NANOELECTRONICS)