Fabrication of a Patterned Replica by Hot Embossing on Various Thicknesses of PMMAFabrication of a Patterned Replica by Hot Embossing on Various Thicknesses of PMMA
- Other Titles
- Fabrication of a Patterned Replica by Hot Embossing on Various Thicknesses of PMMA
- Authors
- Cha, Nam-Goo; Park, Chang-Hwa; Lim, Hyun-Woo; Park, Jin-Goo
- Issue Date
- Nov-2005
- Publisher
- 한국물리학회
- Keywords
- Hot embossing; Nanoimprinting lithography (NIL); Plastic substrate
- Citation
- Journal of the Korean Physical Society, v.47, no.3, pp.530 - 534
- Indexed
- SCIE
SCOPUS
KCI
- Journal Title
- Journal of the Korean Physical Society
- Volume
- 47
- Number
- 3
- Start Page
- 530
- End Page
- 534
- URI
- https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/46234
- ISSN
- 0374-4884
- Abstract
- We investigated the possibility of using hot embossing for polymer-based flexible substrates. A Si mold had a mixture of patterns from 1 μm to 500 μm width and was imprinted on various thicknesses
of PMMA. To obtain a good release process between the mold and replica, an ntistiction layer was coated on the mold.
All procedures were conducted in a clean room to ensure a particle-free result. Printing conditions were optimized as functions of process pressure and temperature plotted and calculated.
Thin layers need a higher temperature and pressure than thick layers. The mold
structures were successfully replicated into a PMMA substrate over the area of a 4-inch wafer.
- Files in This Item
-
Go to Link
- Appears in
Collections - COLLEGE OF ENGINEERING SCIENCES > DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING > 1. Journal Articles
![qrcode](https://api.qrserver.com/v1/create-qr-code/?size=55x55&data=https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/46234)
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.